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MEMS Flow Sensor-MSH01

The sensitive core flow sensor is based on the heat transfer principle. The sensor structure consists of a microheat source located on the sensitive film, an upstream temperature sensor and a downstream temperature sensor symmetrical to the microheat source, and an ambient temperature sensor located on the silicon base. When there is no fluid flow on the sensor surface, the temperature field around the microheat source is symmetrically distributed, as in (a); when there is fluid flow on the sensor surface, the temperature field around the microheat source is disturbed due to the cooling effect of the fluid on the microheat source, and the upstream and downstream of the microheat source is asymmetrically distributed, as in Fig. (b); the greater the velocity of fluid flow, the greater the flow rate of gas carried away from the microheat source, and the asymmetry is greater. The flow velocity of the fluid is obtained by the temperature difference between the upstream and downstream temperature sensors.
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MEMS Flow sensor
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Product description
Parameters
  • Wide range ratio>300:1
  • Fast response time<5ms
  • Ultra-low start-up flow <0.05m/s
  • High sensitivity and accuracy Higher than +/-3% reading accuracy
  • Non-movable parts, high reliability
  • Suitable for clean gases and liquids
  • Medical respiratory, diagnostic equipment
  • Fuel Cell Control
  • Automotive air flow meter
  • Domestic gas equipment
  • Gas and liquid chromatography mass spectrometry analyzer
  • HVAC
  • Leak detector
  • Industrial Automation
Parameters Description Conditions Minimum value Typical values Maximum value Unit
Measurement range Gas measurement range 1tam, ambient temperature 25°C 0.01   35 m/s
RA Air temperature sensor resistance Pins 1 and 5, +25°C 1440 1600 1760
RH Heater temperature resistance Pins 6 and 7, +25°C 90 100 110
RHT Heater temperature sensor resistance Pins 5 and 8, +25°C 540 600 660
RUE Upstream outer temperature sensor resistance Pins 3 and 4, +25°C 1260 1400 1540
RUI Upstream inner temperature sensor resistance Pins 2 and 12, +25°C 1080 1200 1320
RDI Downstream inner temperature sensor resistance Pins 11 and 12, +25°C 1080 1200 1320
RDE Downstream outer temperature sensor resistance Pins 9 and 10, +25°C 1260 1400 1540
TCR Metal thin film TiPt resistance temperature coefficient 0°C~140°C 0.285 0.302 0.330 %/°C
RH limit current No airflow, ambient temperature 25°C Pins 5 and 6 - - 20 mA
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