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MEMS flow sensor - MSH01
MEMS flow sensor - MSH01

MEMS flow sensor - MSH01

The Minshen flow sensor is based on the principle of thermal conduction. The sensor structure consists of a micro-heat source located on a sensitive film, an upstream temperature sensor and a downstream temperature sensor symmetrical to the micro-heat source, and an ambient temperature sensor located on a silicon substrate. When there is no fluid flow on the sensor surface, the temperature field around the micro-heat source is symmetrically distributed, as shown in (a); when there is fluid flow on the sensor surface, due to the cooling effect of the fluid on the micro-heat source, the temperature field around the micro-heat source is disturbed, and the upstream and downstream of the micro-heat source are asymmetrically distributed, as shown in (b); the faster the fluid flow rate, the greater the flow rate of gas taking away heat from the micro-heat source, and the greater the asymmetry of the temperature around the micro-heat source. The flow rate of the fluid is obtained through the temperature difference between the upstream and downstream temperature sensors.

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MEMS flow sensor

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Product Description

  • Wide range ratio >300:1
  • Fast response speed <5ms
  • Ultra-low start-up flow <0.05m/s
  • High sensitivity and high accuracy, above +/-3% reading accuracy
  • No moving parts, high reliability
  • Suitable for clean gases and liquids
  • Medical respiration, diagnostic equipment
  • Fuel cell control
  • Automotive air flow meter
  • Household gas appliances
  • Gas and liquid chromatography mass spectrometry analyzers
  • HVAC
  • Leak detectors
  • Industrial automation
Parameters Description Condition Minimum Typical Maximum Unit
Range Gas measurement range 1tam, ambient temperature 25°C 0.01   35 m/s
RA Air temperature sensor resistance Pins 1 and 5, +25°C 1440 1600 1760 Ω
RH Heater temperature resistance Pins 6 and 7, +25°C 90 100 110 Ω
RHT Heater temperature sensor resistance Pins 5 and 8, +25°C 540 600 660 Ω
RUE Upstream outer temperature sensor resistance Pins 3 and 4, +25°C 1260 1400 1540 Ω
RUI Upstream inner temperature sensor resistance Pins 2 and 12, +25°C 1080 1200 1320 Ω
RDI Downstream inner temperature sensor resistance Pins 11 and 12, +25°C 1080 1200 1320 Ω
RDE Downstream outer temperature sensor resistance Pins 9 and 10, +25°C 1260 1400 1540 Ω
TCR Metal film TiPt resistor temperature coefficient 0°C~140°C 0.285 0.302 0.330 %/°C
RH limit current No airflow, ambient temperature 25°C Pins 5 and 6 - - 20 mA

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