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MEMS Flow Sensor-MSH01
Classification:
MEMS Flow sensor
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Product description
Parameters
- Wide range ratio>300:1
- Fast response time<5ms
- Ultra-low start-up flow <0.05m/s
- High sensitivity and accuracy Higher than +/-3% reading accuracy
- Non-movable parts, high reliability
- Suitable for clean gases and liquids
- Medical respiratory, diagnostic equipment
- Fuel Cell Control
- Automotive air flow meter
- Domestic gas equipment
- Gas and liquid chromatography mass spectrometry analyzer
- HVAC
- Leak detector
- Industrial Automation
Parameters | Description | Conditions | Minimum value | Typical values | Maximum value | Unit |
Measurement range | Gas measurement range | 1tam, ambient temperature 25°C | 0.01 | 35 | m/s | |
RA | Air temperature sensor resistance | Pins 1 and 5, +25°C | 1440 | 1600 | 1760 | Ω |
RH | Heater temperature resistance | Pins 6 and 7, +25°C | 90 | 100 | 110 | Ω |
RHT | Heater temperature sensor resistance | Pins 5 and 8, +25°C | 540 | 600 | 660 | Ω |
RUE | Upstream outer temperature sensor resistance | Pins 3 and 4, +25°C | 1260 | 1400 | 1540 | Ω |
RUI | Upstream inner temperature sensor resistance | Pins 2 and 12, +25°C | 1080 | 1200 | 1320 | Ω |
RDI | Downstream inner temperature sensor resistance | Pins 11 and 12, +25°C | 1080 | 1200 | 1320 | Ω |
RDE | Downstream outer temperature sensor resistance | Pins 9 and 10, +25°C | 1260 | 1400 | 1540 | Ω |
TCR | Metal thin film TiPt resistance temperature coefficient | 0°C~140°C | 0.285 | 0.302 | 0.330 | %/°C |
RH limit current | No airflow, ambient temperature 25°C | Pins 5 and 6 | - | - | 20 | mA |
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