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MEMS Flow Sensor - MSL01
MEMS Flow Sensor - MSL01

MEMS Flow Sensor - MSL01

The Minshen flow sensor is based on the principle of thermal conduction. The sensor structure consists of a micro-heat source located on a sensitive film, an upstream temperature sensor and a downstream temperature sensor symmetrical to the micro-heat source, and an ambient temperature sensor located on a silicon substrate. When there is no fluid flow on the sensor surface, the temperature field around the micro-heat source is symmetrically distributed, as shown in (a); when there is fluid flow on the sensor surface, due to the cooling effect of the fluid on the micro-heat source, the temperature field around the micro-heat source is disturbed, and the upstream and downstream of the micro-heat source are asymmetrically distributed, as shown in (b); the faster the fluid flow rate, the greater the flow rate of gas taking away heat from the micro-heat source, and the greater the asymmetry of the temperature around the micro-heat source. The flow rate of the fluid is obtained through the temperature difference between the upstream and downstream temperature sensors.

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MEMS flow sensor

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Product Description

  • Wide range ratio > 300:1
  • Fast response speed < 5ms
  • Ultra-low startup flow < 0.05m/s
  • High sensitivity and high accuracy, above +/-3% reading accuracy
  • No moving parts, high reliability
  • Suitable for clean gases and liquids
  • Medical respiration, diagnostic equipment
  • Fuel cell control
  • Automotive air flow meter
  • Household gas appliances
  • Gas and liquid chromatography mass spectrometry analyzers
  • HVAC
  • Leak detector
  • Industrial automation
Parameters Description Conditions Minimum Value Typical Value Maximum Value Unit
Range Gas Measurement Range 1tam, ambient temperature 25°C 0.01   10 m/s
RA Ambient Temperature Sensor Resistance Pins 1 and 2, +25°C 2700 3000 3300 Ω
RH Heater Temperature Resistance Pins 5 and 6, +25°C 198 220 242 Ω
RUE Upstream Outer Temperature Sensor Resistance Pins 4 and 8, +25°C 1440 1600 1760 Ω
RUI Upstream Inner Temperature Sensor Resistance Pins 3 and 7, +25°C 1440 1600 1760 Ω
RDI Downstream Inner Temperature Sensor Resistance Pins 3 and 4, +25°C 1440 1600 1760 Ω
RDE Downstream Outer Temperature Sensor Resistance Pins 7 and 8, +25°C 1440 1600 1760 Ω
TCR Pt Resistor Temperature Coefficient -40°C~125°C 0.218 0.230 0.253 %/°C
RH Limit Current No airflow, ambient temperature 25°C Pins 5 and 6 - - 15 mA

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