The Minshen flow sensor is based on the principle of thermal conduction. The sensor structure consists of a micro-heat source located on a sensitive film, an upstream temperature sensor and a downstream temperature sensor symmetrical to the micro-heat source, and an ambient temperature sensor located on a silicon substrate. When there is no fluid flow on the sensor surface, the temperature field around the micro-heat source is symmetrically distributed, as shown in (a); when there is fluid flow on the sensor surface, due to the cooling effect of the fluid on the micro-heat source, the temperature field around the micro-heat source is disturbed, and the upstream and downstream of the micro-heat source are asymmetrically distributed, as shown in (b); the faster the fluid flow rate, the greater the flow rate of gas taking away heat from the micro-heat source, and the greater the asymmetry of the temperature around the micro-heat source. The flow rate of the fluid is obtained through the temperature difference between the upstream and downstream temperature sensors.
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The Minshen flow sensor is based on the principle of thermal conduction. The sensor structure consists of a micro-heat source located on a sensitive film, an upstream temperature sensor and a downstream temperature sensor symmetrical to the micro-heat source, and an ambient temperature sensor located on a silicon substrate. When there is no fluid flow on the sensor surface, the temperature field around the micro-heat source is symmetrically distributed, as shown in (a); when there is fluid flow on the sensor surface, due to the cooling effect of the fluid on the micro-heat source, the temperature field around the micro-heat source is disturbed, and the upstream and downstream of the micro-heat source are asymmetrically distributed, as shown in (b); the faster the fluid flow rate, the greater the flow rate of gas taking away heat from the micro-heat source, and the greater the asymmetry of the temperature around the micro-heat source. The flow rate of the fluid is obtained through the temperature difference between the upstream and downstream temperature sensors.
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